Electron Beam Evaporator for enabling advanced fabrication processes at Lund Nano Lab

Scope

Lund Nano Lab is planning to purchase a new electron beam (e-beam) evaporator system. This system will be highly automated, capable of multi-layer deposition on substrates up to 150 mm diameter, via a user defined recipe. The system will be capable of evaporating materials with high melting temperatures such as tungsten and molybdenum. A key attribute of the system will be a very short pump down time, resulting in completion of a simple evaporation process (vent - evacuate – evaporate (e.g. 100nm Au) – vent) in under 30 minutes.

The tool will also be capable of full operation in a custom configuration mode, in which it will accommodate custom sample mounts, as defined in this document and associated appendices.