Reactive Ion Etcher

The Laboratory of Organic Electronics (LOE) at LiU intends to purchase a Reactive Ion Etching System (RIE) for use in microfabrication. The required system is used to dry etch different kinds of materials, including polymeric materials such as, for instance, photoresists by O2, CF4, and CHF3 gases.

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Lot nr.: 1

Added value

The Laboratory of Organic Electronics (LOE) at LiU intends to purchase a Reactive Ion Etching System (RIE) for use in microfabrication. The required system is used to dry etch different kinds of materials, including polymeric materials such as, for instance, photoresists by O2, CF4, and CHF3 gases.

Last tender date: 03/29/2024 22:59:59

Type of contract: Supplies

Authority: Linköpings universitet

Document URL: https://tendsign.com/doc.aspx?MeFormsNoticeId=10316

Tenders URL: https://tendsign.com/doc.aspx?MeFormsNoticeId=10316&GoTo=Tender

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Lot nr.: 2

General Requirements (1)

The Laboratory of Organic Electronics (LOE) at LiU intends to purchase a Reactive Ion Etching System (RIE) for use in microfabrication. The required system is used to dry etch different kinds of materials, including polymeric materials such as, for instance, photoresists by O2, CF4, and CHF3 gases.

Last tender date: 03/29/2024 22:59:59

Type of contract: Supplies

Authority: Linköpings universitet

Document URL: https://tendsign.com/doc.aspx?MeFormsNoticeId=10316

Tenders URL: https://tendsign.com/doc.aspx?MeFormsNoticeId=10316&GoTo=Tender