Chalmers tekniska högskola Procurement of electroplating equipment

Procurement of electroplating equipment

Chalmers Tekniska Högskola Aktiebolag

Direct award

Request for tender: Procurement of electroplating equipment

Description of goods/services

At the department of Microtechnology and Nanoscience MC2, Chalmers University of Technology, we do research on Micro- and Nano-electronics, the basic physics of solid-state devices, on-chip quantum optics, and quantum information.

We are currently developing new gold and indium electroplating processes for small pieces up to 4-inch wafers that will be located in our cleanroom. These two new processes are intended to each have a dedicated cell (tank) and to share thermostat and agitation solution. Reproducibility is important for our processes and we are therefore looking for a system with high degree of control of process parameters. Among these are: distance between electrodes, electrolyte circulation, agitation of electrolyte in front of workpiece etc. Not only is the reproducibility an important parameter, we also need to achieve a high degree of uniformity over the wafer as possible.

Requirements specifications of goods/services

The purchase must include the following products/commitments/services:

Required technical specifications

In the following technical specifications, the "must" means a definite requirement. If the tender does not carry out all the “must” requirements it will be excluded from further evaluation. When the "should" is used, the specific item or function is not necessary but is an advantage.

Basic requirements

Equipment

Equipment requirements

M1 The setup must include one dedicated plating cell for each of the processes (two in total) and these cells must be dimensioned to fit 4-inch wafers (100 mm) and up to 5 L of electrolyte solution. The two plating cells should be compatible with indium sulphamate and Neutronex 309 plating solutions respectively.

M2 The equipment must include agitation and heating solutions. The gold process should be held at 50 – 55 °C and the indium process should be kept at 25 °C. It is preferable if the two heaters can share a common thermostat and that a common motor can drive agitation for the two cells, not necessarily at the same time.

M3 Each of the two plating cells must have a separate pump with associated filter suitable to the respective plating solution to remove particles that otherwise can reduce the plating uniformity.

M4 Each of the two plating cells must be equipped with a drain for easy cleaning and exchange of the plating electrolyte.

M5 The plating cells must have dedicated slots for cathode and anode jigs that makes it easy for the operator to set electrode distance before processing. 

M6 The plating cells must have space for additional electrodes when running advanced experiments with a potentiostat.

S1 The plating cells should be equipped with lids that enables the cells to act as stationary containers for the electrolyte solution without risk of contamination or spill.

Supply requirements

M7 The equipment must be designed to fit the Swedish electrical system: 3-phase with 400 V between the different phases and 230 V between any phase and the neutral. The frequency is 50 Hz. Other requirements should be specified (such as water, compressed air, etc.).

Laboratory space

M8     The total footprint must be specified, as well as that of ancillary parts such as valves and clamps etc. that might stick out from the baths. The two baths must fit into a wet bench where the free dimensions are 27x66cm (WxD). If the setup requires a stand-alone paddle/stirring unit, then this needs to be included with the dimensions of the two baths. Dimensions of the two plating baths and extras will be taken into account when choosing the winning options.

Please see attached picture.

Delivery

The complete system must be delivered within 6 months of the date of the order.

Documentation

M9     Documentation covering operation, installation, maintenance, trouble shooting, cable schematics, and any other components or equipment included in the order must be included.

Tools

M10    Any special tools or equipment needed for maintenance must be included.

Options

The following options must be included in the quotation as separate items and priced individually.

O1: Cathode holders designed for small pieces up to 4-inch wafers. These holders should be designed with electrical connectors placed on equal distances in a ring. The cathode holders should be listed both with and without sealing together with geometries for each.

O2: Anode holders with filter bags. These holders should be designed to fit different types of anode pieces, e.g., strips of metal, pellets, grates etc.

O3: Anode pieces relevant for the two processes should be listed as options.

O4: Connectors, clips, electrode holders etc.

Price

Price shall be submitted in SEK excluding VAT and include all related costs requested in this request for tender.

The price must be specified in total for all the items in the technical specification, except for the items we specifically ask to be priced separately.

The price must include freight costs, packaging, insurance, on-site installation (if needed), and any import/export duties, if applicable.

Agreement terms

The supplier must accept all agreement terms.

Tender submission

The tender must be received no later than 2022-02-28

The tender shall be valid until 2022-04-21

Evaluation of tenders

The most economically advantageous tender (i.e. an assessment of price, quality, service etc.) will be chosen.

Description of the criteria that will be assessed (in the prioritized order):

We will choose the tender that is the most financially advantageous when all the circumstances are considered together. For this evaluation, we will only consider: Function and Performance, Price for the system, with including options and finally Delivery Time. The tender that fulfills all the must requirements with the best functional and performance at lowest total price and the best delivery time will be given the contract.

Confidentiality and the freedom of information principle

After the procurement has been terminated the principle of public access to official records applies. This means that all documents related to the procurement process become public and may be disclosed to anyone who requests access to them. Exceptions may only be made if there is any specific reason to believe that the Tenderer may suffer damage if the information is disclosed.

If you have information that you feel is of such nature, your tender shall include precise details of which information should remain confidential, and how you would suffer damage in case of the public disclosure of this information. Chalmers will evaluate your request and determine whether confidentiality in accordance with Swedish law may be deemed to apply.

Sista anbudsdag
Avbruten

(2022-02-28)

Förfarande

Direktupphandling

Publicerad

2022-02-22

Dokumenttyp

Direktupphandling

Leveransorter

Västra Götalands län

Diarie-/referensnummer

MC2 2022-0039